New oxidation furnace to strengthen MEMS development in the Centre for Energy Research


A new oxidation furnace has been put in operation in the MEMS Laboratory of the Centre for Energy Research (CER), a member of the Eötvös Lóránd Research Network. Financed by the European Union, the investment represents a major step in the upgrade of the existing Si processing line, signaling a major contribution to the enhancement of both the R&D activities and higher education training in the field of sensor development and related material research.

The four-tube system is calibrated for dry and wet oxidation, as well as for medium and high-temperature annealing processes required in Si-based MEMS fabrication. The new equipment significantly improves the overall quality of the processing line, something which is essential for engaging in a competitive R&D activity. This may be well demonstrated in the execution of the ongoing H2020 ECSEL projects that CER is involved in, namely “A pilot line for the next generation of smart catheters and implants (POSITIONII)” and “Enabling Moore for Medical (Moore4Med),” as well as in the Russian-Hungarian bilateral sensor development project entitled “Low power consumption-type nanosensors for gas detecting in a harsh environment”.


In addition to the international activity, the laboratory’s research group is highly committed to supporting domestic industrial needs and higher education by hosting BSc and MSc students and offering PhD research topics.

The project, which has a total value of HUF 227 million, was jointly funded by the European Union and the Hungarian Government from the European Structural and Investment Funds, via the Competitive Central-Hungary Operative Program – Strategic R&D centers.

More information:


Dr. Dücső, Csaba, project leader

ELKH Centre for Energy Research, Institute for Technical Physics and Material Science

Phone: +36 1 392 2222/3885